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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6841483
Issue Dt:
01/11/2005
Application #:
09782185
Filing Dt:
02/12/2001
Publication #:
20020111036
Pub Dt:
08/15/2002
Inventors:
Helen H. Zhu, James R. Bowers, Ian J. Morey, Wayne Babie, Michael Goss
Title:
UNIQUE PROCESS CHEMISTRY FOR ETCHING ORGANIC LOW-K MATERIALS
Assignment: 1
Reel/Frame:
011858/0020Recorded: 06/04/2001Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZHU, HELEN H.
Exec Dt:
02/16/2001
BOWERS, JAMES R.
Exec Dt:
03/29/2001
MOREY, IAN J.
Exec Dt:
02/16/2001
BABIE, WAYNE
Exec Dt:
02/20/2001
GOSS, MICHAEL
Exec Dt:
02/22/2001
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BEYER WEAVER & THOMAS, LLP
MICHAEL LEE
P.O. BOX 778
BERKELEY, CA 94704-0778

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