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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
09798258
Filing Dt:
03/02/2001
Publication #:
Pub Dt:
09/05/2002
Inventors:
Anh N. Nguyen, Michael X. Yang, Ming Xi, Hua Chung, Anzhong Chang, Xiaoxiong Yuan et al
Title:
Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films
Assignment: 1
Reel/Frame:
011873/0058Recorded: 06/06/2001Pages: 15
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/08/2001
Exec Dt:
05/07/2001
Exec Dt:
05/09/2001
Exec Dt:
05/07/2001
Exec Dt:
05/08/2001
Exec Dt:
05/09/2001
Exec Dt:
05/07/2001
Assignee:
LEGAL AFFAIRS DEPARTMENT
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
LEGAL AFFAIRS DEPT
P.O. BOX 450-A
SANTA CLARA, CA 95052

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