Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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09997646
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Filing Dt:
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11/28/2001
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Publication #:
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Pub Dt:
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09/05/2002
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Inventors:
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Teruaki Okino, Shintaro Kawata
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Title:
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APPARATUS AND METHODS FOR BLOCKING HIGHLY SCATTERED CHARGED PARTICLES IN A PATTERNED BEAM IN A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDFING, 2-3 |
| MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN LLP |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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