Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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09914361
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Filing Dt:
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08/27/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Inventors:
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Akira Ishikawa, Yoshijiro Ushio
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Title:
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METHOD AND APPARATUS FOR MONITORING POLISHING STATE, POLISHING DEVICE, PROCESS WAFER, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI, 3-CHOME, CHIYODA-KU, |
| TOKYO 100-8331,, JAPAN |
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| MORGAN, LEWIS & BOCKIS LLP |
| ROBERT J. GAYBRICK |
| 1800 M STREET, N.W. |
| WASHINGTON, D.C. 20036 |
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