Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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10102391
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Filing Dt:
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03/18/2002
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Publication #:
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Pub Dt:
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09/26/2002
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Inventors:
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Hideki Adachi, Katsuhiko Miya, Akira Izumi, Itsuki Kajino
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-CHOME, HORIKAWA-DORI |
| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU |
| KAMIKYO-KU, KYOTO, JAPAN |
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| OSTROLENK, FABER, GERB & SOFFEN, LLP |
| MAX MOSKOWITZ |
| 1180 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036-8403 |
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