Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09798424
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Filing Dt:
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03/02/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Inventors:
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Lee Luo, Henry Ho, Shulin Wang, Binh Hoa Tran, Alexander Tam, Errol A.C. Sanchez et al
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Title:
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EMISSIVITY-CHANGE-FREE PUMPING PLATE KIT IN A SINGLE WAFER CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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