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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/07/2006
Application #:
10085935
Filing Dt:
03/01/2002
Publication #:
Pub Dt:
11/14/2002
Inventors:
Takanobu Takeda, Jun Hatakeyama, Toshinobu Ishihara, Yasufui Kubota, Tohru Kubota
Title:
SILICON-CONTAINING POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
Assignment: 1
Reel/Frame:
012657/0142Recorded: 03/01/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/14/2002
Exec Dt:
02/14/2002
Exec Dt:
02/14/2002
Exec Dt:
02/14/2002
Exec Dt:
02/14/2002
Assignee:
6-1 OTERMACHI, 2-CHOME
CHIYODA-KU TOKYO, JAPAN
Correspondent:
MILLEN, WHITE, ZELANO & BRANIGAN, P.C.
JOANN P. HUGHES
2200 CLARENDON BOULEVARD
SUITE 1400
ARLINGTON, VA 22201

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