Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10144800
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Filing Dt:
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05/15/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Inventors:
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Michihiko Yanagisawa, Tadayoshi Okuya
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Title:
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LOCAL DRY ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2647, HAYAKAWA |
| AYASE-CITY, KANAGAWA-PREF. 252-1123, JAPAN |
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| MORRISON & FOERSTER LLP |
| BARRY E. BRETSCHNEIDER |
| 2000 PENNSYLVANIA AVE., NW |
| WASHINGTON, DC 20006-1888 |
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