Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10150966
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Filing Dt:
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05/17/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Inventor:
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Masahiro Kimura
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Title:
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Substrate processing apparatus and substrate processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HORIKAWA-DORI, KAMIKYO-KU |
| 1-1 TENJINKITAMACHI TERANOUCHI-AGARU 4-CHOME |
| KYOTO, JAPAN |
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| OSTROLENK, FABER, GERB ET AL |
| ROBERT C. FABER |
| 1180 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036-8403 |
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