Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10141824
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Filing Dt:
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05/10/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Inventor:
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Shunji Yamada
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Title:
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Wafer chuck having refrigerating plate serving as chucking plate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA-KU |
| 9-11 KITASHINAGAWA 5-CHOME |
| TOKYO 141-8686, JAPAN |
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| ARENT FOX KINTNER PLOTKIN & KAHN PLLC |
| GEORGE E. ORAM JR |
| 1050 CONNECTICUT AVENUE NW |
| SUITE 400 |
| WASHINGTON, D.C. 20036-5339 |
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