Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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10160243
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Filing Dt:
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06/04/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Chishio Koshimizu, Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi
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Title:
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PLASMA PROCESSING METHOD AND APPARATUS FOR ELIMINATING DAMAGES IN A PLASMA PROCESS OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| PILLSBURY WINTHROP LLP |
| DALE S. LAZAR |
| INTELLECTUAL PROPERTY GROUP |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VIRGINIA 22102 |
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