Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10091588
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Filing Dt:
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03/07/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Shinyo Kimoto, Kenji Tokunaga, Seokhyun Kim, Terumi Muguruma, Yoshiaki Yamada et al
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Title:
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Substrate processing apparatus, substrate processing system, and substrate conveying method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-1 ONOGAWA TSUKUBA-SHI |
| IBARAKI 305-0053, JAPAN |
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| FOLEY & LARDNER |
| WILLIAM T. ELLIS |
| WASHINGTON HARBOUR |
| 3000 K STREET, N.W., SUITE 500 |
| WASHINGTON, DC 2007-5143 |
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