Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10007054
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Filing Dt:
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12/03/2001
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Noriyuki Yokouchi, Natsumi Ueda, Yasumasa Sasaki, Fumio Koyama, Kenichi Iga
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Title:
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Wafer oxidation reactor and a method for forming a semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100-8322, JAPAN |
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| KNOBBE, MARTENS, OLSON & BEAR, LLP |
| THOMAS R. ARNO |
| 620 NEWPORT CENTER DRIVE |
| SIXTEENTH FLOOR |
| NEWPORT BEACH, CA 92660 |
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