Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09865709
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Filing Dt:
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05/29/2001
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Jen-Chieh Tung, Hao-Ming Lien, Jiun-Fang Wang
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Title:
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Polishing pad with wear indicator for profile monitoring and controlling and method and apparatus for polishing using said pad
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.19, LI HSIN RD. SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C |
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| STEVENS, DAVIS, MILLER, ET AL |
| JAMES E. LEDBETTER, ESQ. |
| 1615 L STREET, N.W., SUITE 850 |
| WASHINGTON, DC 20036 |
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