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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10106246
Filing Dt:
03/27/2002
Publication #:
Pub Dt:
12/26/2002
Inventors:
Tetsuo Yamamoto, Makoto Ozawa, Shuji Yonemitsu, Toshimitsu Miyata
Title:
Substrate processing apparatus and a method for fabricating a semiconductor device by using same
Assignment: 1
Reel/Frame:
012731/0849Recorded: 03/27/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/12/2002
Exec Dt:
03/12/2002
Exec Dt:
03/12/2002
Exec Dt:
03/12/2002
Assignee:
14-20, 3-CHOME, HIGASHI-NAKANO
NAKANO-KU, TOKYO 164-8511, JAPAN
Correspondent:
BACON & THOMAS, PLLC
EUGENE MAR
625 SLATERS LANE
FOURTH FLOOR
ALEXANDRIA, VA 22314

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