Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10214754
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Filing Dt:
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08/09/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Inventors:
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Hideo Nakagawa, Toshio Hayashi, Yasuhiro Morikawa
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Title:
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METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 2500, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8543 |
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| NIXON PEABODY LLP |
| DONALD R. STUDEBAKER |
| 8180 GREENSBORO DRIVE |
| SUITE 800 |
| MCLEAN, VA 22102 |
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