Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10138288
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Filing Dt:
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05/02/2002
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Publication #:
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Pub Dt:
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01/09/2003
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Inventors:
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Harmeet Singh, John E. Daugherty, Saurabh J. Ullal
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Title:
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High pressure wafer-less auto clean for etch applications
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| MICHAEL L. GENCARELLA |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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