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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
6967168
Issue Dt:
11/22/2005
Application #:
09896722
Filing Dt:
06/29/2001
Publication #:
20030006214
Pub Dt:
01/09/2003
Inventors:
Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi, Henry N. Chapman
Title:
METHOD TO REPAIR LOCALIZED AMPLITUDE DEFECTS IN A EUV LITHOGRAPHY MASK BLANK
Assignment: 1
Reel/Frame:
013636/0810Recorded: 05/08/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
STEARNS, DANIEL G.
Exec Dt:
07/05/2001
SWEENEY, DONALD W.
Exec Dt:
06/28/2001
MIRKARIMI, PAUL B.
Exec Dt:
06/26/2001
CHAPMAN, HENRY N.
Exec Dt:
06/26/2001
Assignee:
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
1111 FRANKLIN STREET
OAKLAND, CALIFORNIA 94607-5200
Correspondent:
LAWRENCE LIVERMORE NATIONAL LABORATORY
ALAN H. THOMPSON
L-703
P. O. BOX 808
LIVERMORE, CA 94551
Assignment: 2
Reel/Frame:
013391/0768Recorded: 10/07/2002Pages: 3
Conveyance:
CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
Assignor:
CALIFORNIA, UNIVERSITY OF
Exec Dt:
09/04/2002
Assignee:
ENERGY, U.S. DEPARTMENT OF
P.O. BOX 808 (L-376)
LIVERMORE, CALIFORNIA 94550
Correspondent:
U.S. DEPARTMENT OF ENERGY
WILLIAM C. DAUBENSPECK
LAWRENCE LIVERMORE NATIONAL LABORATORY
P.O. BOX 808 (MS L-376)
LIVERMORE, CA 94550
Assignment: 3
Reel/Frame:
014020/0949Recorded: 10/01/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Exec Dt:
09/26/2003
Assignee:
EUV LIMITED LIABILITY COMPANY
3065 BOWERS AVE.
C/O INTEL CORPORATION, SCI-2-B1
SANTA CLARA, CALIFORNIA 95052-8119
Correspondent:
LAWRENCE LIVERMORE NAT. LABORATORY
ALAN H. THOMPSON
PATENT GROUP, L-703
BOX 808, L-703
LIVERMORE, CA 94551
Assignment: 4
Reel/Frame:
014020/0958Recorded: 10/01/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
CALIFORNIA, REGENTS OF THE UNIVERSITY OF, THE
Exec Dt:
09/26/2003
Assignee:
EUV LIMITED LIABILITY COMPANY
3065 BOWERS AVE.
C/O INTEL CORPORATION, SCI-2-B1
SANTA CLARA, CALIFORNIA 95052-8119
Correspondent:
LAWRENCE LIVERMORE NAT. LABORATORY
ALAN H. THOMPSON
PATENT GROUP, L-703
BOX 808, L-703
LIVERMORE, CA 94551

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