Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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10165324
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Filing Dt:
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06/10/2002
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Publication #:
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Pub Dt:
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01/09/2003
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Inventors:
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Eiji Hayashi, Atsushi Shiota, Kinji Yamada, Michinori Nishikawa
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Title:
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METHOD FOR THE FORMATION OF SILICA FILM, SILICA FILM, INSULATING FILM, AND SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-24, TSUKIJI 2-CHOME, CHUO-KU |
| TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| NORMAN F. OBLON |
| 1755 JEFFERSON DAVIS HIGHWAY |
| FOURTH FLOOR |
| ARLINGTON, VA 22202 |
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