Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09840638
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Filing Dt:
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04/20/2001
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Publication #:
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Pub Dt:
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01/09/2003
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Inventors:
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MoSong Cheng, Andrew R. Neureuther
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Title:
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METHOD AND APPARATUS FOR ENHANCING RESIST SENSITIVITY AND RESOLUTION BY APPLICATION OF AN ALTERNATING ELECTRIC FIELD DURING POST-EXPOSURE BAKE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1111 FRANKLIN ST., 12TH FLOOR |
| OAKLAND, CALIFORNIA 94607 |
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| REED & ASSOCIATES |
| J. ELIN HARTRUM |
| 800 MENLO AVENUE |
| SUITE 210 |
| MENLO PARK, CALIFORNIA 94025 |
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