Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10204322
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Filing Dt:
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08/21/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Inventors:
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Kiyoshi Komiyama, Shinichi Watanabe, Kazunori Gotoda
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Title:
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GAS LEAKAGE DETECTION SYSTEM, GAS LEAKAGE DETECTION METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| 1-25 MINAMI KAMATA 1-CHOME |
| OHTA-KU TOKYO 144-8505, JAPAN |
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| PILLSBURY WINTHROP LLP |
| GLENN J. PERRY |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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