Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09905058
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Filing Dt:
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07/12/2001
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Publication #:
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Pub Dt:
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01/23/2003
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Inventors:
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Alan C. Janos, Daniel B. Richardson
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Title:
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TUNABLE RADIATION SOURCE PROVIDING A VUV WAVELENGTH PLANAR ILLUMINATION PATTERN FOR PROCESSING SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| WATTS, HOFFMANN, FISHER ET AL |
| GEORGE L. PINCHAK |
| 1100 SUPERIOR AVE, STE 1750 |
| CLEVELAND, OH 44114-2518 |
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Assignment:
2
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
| ARLINGTON, VA 22202 |
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