Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10183360
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Inventors:
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William Jones, Michael Grapperhaus, Andrej Mitrovic, Robert Jackson
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Title:
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Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomography
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER |
| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| MICHAEL R. CASEY |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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