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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/14/2003
Application #:
09924240
Filing Dt:
08/07/2001
Publication #:
Pub Dt:
02/13/2003
Inventors:
Wai-Fan Yau, Ju-Hyung Lee, Nasreen Gazala Chopra, Tzu-Fang Huang, David Cheung et al
Title:
METHOD OF DEPOSITING LOW DIELECTRIC CONSTANT CARBON DOPED SILICON OXIDE
Assignment: 1
Reel/Frame:
012082/0307Recorded: 08/07/2001Pages: 35
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/11/2001
Exec Dt:
07/20/2001
Exec Dt:
07/20/2001
Exec Dt:
07/17/2001
Exec Dt:
07/19/2001
Exec Dt:
07/12/2001
Exec Dt:
07/13/2001
Exec Dt:
07/25/2001
Exec Dt:
08/02/2001
Exec Dt:
07/25/2001
Exec Dt:
07/26/2001
Assignee:
P.O. BOX 450A
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
PETER J. SGARBOSSA
PATENT COUNSEL
P.O. BOX 450A
SANTA CLARA, CA 95052

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