Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10197230
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Filing Dt:
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07/16/2002
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Publication #:
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Pub Dt:
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02/13/2003
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Inventors:
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Charles W. Schietinger, Ronald A. Palfenier
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Title:
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WAFER TEMPERATURE MEASUREMENT METHOD FOR PLASMA ENVIRONMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 PARK AVENUE |
| FLORHAM PARK, NEW JERSEY 07932 |
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| BASF CORPORATION |
| 100 PARK AVENUE |
| FLORHAM PARK, NJ 07932 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 PARK AVENUE |
| FLORHAM PARK, NEW JERSEY 07932 |
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| BASF CORPORATION |
| 100 PARK AVENUE |
| FLORHAM PARK, NJ 07932 |
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