Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10194560
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Inventors:
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Benjamin A. Bonner, Anand N. Iyer, Deepak N. Kumar, Thomas H. Osterheld, Wei-Yung Hsu et al
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Title:
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METHODS AND COMPOSITIONS FOR CHEMICAL MECHANICAL POLISHING SHALLOW TRENCH ISOLATION SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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POB 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
PATENT COUNSEL |
P.O. BOX 450-A |
SANTA CLARA, CA 95052 |
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