Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09946732
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Filing Dt:
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09/06/2001
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Publication #:
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Pub Dt:
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03/06/2003
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Inventors:
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Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi et al
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Title:
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METHOD OF MONITORING AND/OR CONTROLLING A SEMICONDUCTOR MANUFACTURING APPARATUS AND A SYSTEM THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6, KANDA SURUGADAI 4-CHOME |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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