Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10125588
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Filing Dt:
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04/19/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Inventors:
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Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Shinichi Mitani, Hideki Arai, Hideki Ito
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Title:
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Wafer transfer method performed with vapor thin film growth system and wafer support member used for this method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-11 GINZA 4-CHOME CHUUOU-KU |
| TOKYO 104-0061, JAPAN |
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| FOLEY & LARDNER |
| RICHARD L. SCHWAAB |
| WASHINGTON HARBOUR |
| 3000 K STREET, N.W., SUITE 500 |
| WASHINGTON, D.C. 20007-5143 |
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