Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10236779
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Filing Dt:
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09/06/2002
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Publication #:
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Pub Dt:
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03/13/2003
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Inventor:
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Norihiro Katakura
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Title:
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Methods for manufacturing reticles and reticle blanks exhibiting reduced warp and resist stress for use in charged-particle-beam microlithography
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| KLARQUIST SPARKMAN LLP |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OREGON 97204-2988 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| KLARQUIST SPARKMAN LLP |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 SW SALMON STREET |
| PORTLAND, OR 97204-2988 |
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