Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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09959315
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Filing Dt:
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01/25/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Inventors:
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Kazutoshi Mizushima, Nakaji Miura, Yasuhiro Sekine, Makoto Suzuki, Kazuya Tomii
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Title:
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METHOD FOR APPARATUS FOR POLISHING OUTER PERIPHERAL CHAMFERED PART OF WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-2, MARUNOUCHI 1-CHOME |
| CHIYODA-KU, TOKYO 100-0005, JAPAN |
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| CROWELL & MORING LLP |
| J. D. EVANS |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 14300 |
| WASHINGTON, D.C. 20044-4300 |
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