Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2005
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Application #:
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10253010
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Filing Dt:
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09/23/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Inventors:
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Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Noriaki Yokono, Kenji Sugimoto et al
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Title:
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SUBSTRATE PROCESSING APPARATUS CONTROL SYSTEM AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 TENJINKITAMACHI |
| TERANOUCHI-AGARU 4-CHOME |
| HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN |
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| OSTROLENK, FABER, GERB & SOFFEN, LLP |
| MAX MOSKOWITZ |
| 1180 AVENUE OF THE AMERICAS |
| NEW YORK, NEW YORK 10036-8403 |
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