Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10263699
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Filing Dt:
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10/04/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Inventor:
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Toshihisa Tomie
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Title:
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METHOD AND APPARATUS FOR INSPECTING MULTILAYER MASKS FOR DEFECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 KASUMIGASEKI 1-CHOME, CHIYODA-KU |
| TOKYO 100-8921, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL |
| PAUL A. SACHER |
| 1940 DUKE STREET |
| ALEXANDRIA, VIRGINIA 22314 |
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