Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/12/2006
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Application #:
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10298740
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Filing Dt:
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11/18/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Inventors:
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Kazuya Togashi, Masayoshi Danbata, Kuniaki Arai, Kaori Matsumoto
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Title:
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METHOD OF MANUFACTURING EPITAXIAL SILICON WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2612, SHINOMIYA HIRATSUKA-SHI |
| KANAGAWA, JAPAN 254-0014 |
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| GERALD T. SHEKLETON |
| 120 S. RIVERSIDE PLAZA, 22ND FLOOR |
| CHICAGO, IL 60606-3912 |
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