Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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10144025
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Filing Dt:
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05/14/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Inventors:
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Riichiro Takahashi, Kei Hayasaki, Tomoyuki Takeishi, Shinichi Ito
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Title:
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ALKALINE SOLUTION AND MANUFACTURING METHOD, AND ALKALINE SOLUTION APPLIED TO PATTERN FORMING METHOD, RESIST FILM REMOVING METHOD, SOLUTION APPLICATION METHOD, SUBSTRATE TREATMENT METHOD, SOLUTION SUPPLY METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 1-1 SHIBAURA 1-CHOME |
| TOKYO, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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