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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/25/2003
Application #:
10052842
Filing Dt:
10/19/2001
Publication #:
Pub Dt:
04/24/2003
Inventors:
Chung-En Kao, Min-Te Lai
Title:
APPARATUS AND METHOD FOR SELF-ALIGNING A COVER RING IN A SPUTTER CHAMBER
Assignment: 1
Reel/Frame:
012386/0133Recorded: 10/17/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/23/2001
Exec Dt:
07/23/2001
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
NO. 121 PARK AVENUE 3
HSIN-CHU, TAIWAN R.O.C
Correspondent:
TUNG & ASSOCIATES
RANDY W. TUNG
838 W. LONG LAKE ROAD
SUITE 120
BLOOMFIELD HILLS, MICHIGAN 48302

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