Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10278562
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Filing Dt:
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10/23/2002
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Publication #:
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Pub Dt:
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05/08/2003
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Inventors:
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Martin Ebert, Li Chen
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Title:
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Optical metrology tool with dual camera path for simultaneous high and low magnification imaging
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1250 RELIANCE WAY |
| FREMONT, CALIFORNIA 94539 |
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| STALLMAN & POLLOCK LLP |
| ATTN: MICHAEL A. STALLMAN |
| 353 SACRAMENTO STREET, SUITE 2200 |
| SAN FRANCISCO, CA 94111 |
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