Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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09986485
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Filing Dt:
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11/09/2001
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Publication #:
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Pub Dt:
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05/15/2003
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Inventors:
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Masanao Hotta, Yasuhiko Kojima, Takaomi Ito, Katsumi Yokota, Tetsuyuki Okabayashi et al
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Title:
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ELECTRON BEAM LITHOGRAPHY SYSTEM AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-7-6, MOTOYOKOYAMA, HACHIOJI |
TOKYO, 192-0063, JAPAN |
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WENDEROTH, LIND & PONACK, L.L.P. |
CHARLES R. WATTS |
2033 K STREET, N.W., STE. 800 |
WASHINGTON, DC 20006-1021 |
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