Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10267002
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Filing Dt:
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10/07/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Inventors:
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Sergei V. Govorkov, Klaus Wolfgang Vogler, Frank Voss, Gongxue Hua, Rainer Paetzel
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Title:
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Beam delivery system for lithographic exposure radiation source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HANS-BOCKLER-STRASSE 12 |
| D-37079 GOTTINGEN, GERMANY |
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| SIERRA PATENT GROUP, LTD. |
| ANDREW V. SMITH |
| P.O. BOX 6149 |
| STATELINE, NV 89449 |
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