Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10006462
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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06/05/2003
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Inventor:
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Steven R. Walther
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Title:
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Dose uniformity control for plasma doping systems
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT |
| ASSOCIATES, INC. |
| GARY L. LOSER, ESQ. |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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