Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10305951
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Filing Dt:
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11/29/2002
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Publication #:
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Pub Dt:
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06/05/2003
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Inventors:
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Youbun Ito, Takayuki Katsunuma, Koichiro Inazawa, Tomoki Suemasa, Kazuya Nagaseki et al
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Title:
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Plasma processing apparatus and processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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OBLON SPIVAK ET AL |
1755 J. DAVIS HWY |
4TH FL. |
ARLINGTON VA 22202 |
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04/29/2024 05:00 AM
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