Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10215068
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Filing Dt:
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08/07/2002
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Publication #:
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Pub Dt:
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06/12/2003
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Inventors:
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Ravi Jallepally, Shih-Hung Li, Alain Duboust, Daniel A. Carl, Jun Zhao, Liang-Yuh Chen
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Title:
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APPARATUS AND METHOD FOR FAST-CYCLE ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MUCAHY |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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