Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10163453
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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06/12/2003
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Inventors:
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Kazutoshi Anabuki, Hiroshi Tanaka, Naoki Yokoi, Masahiko Higashi
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Title:
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Semiconductor substrate cleaning apparatus, method of cleaning semiconductor substrate and method of manufacturing semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8 |
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| MCDERMOTT, WILL & EMERY |
| STEPHEN A. BECKER |
| 600 13TH STREET, N.W. |
| WASHINGTON, D.C. 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-1, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-6334 |
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| MCDERMOTT, WILL & EMERY |
| STEPHEN A. BECKER |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-1, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-6334 |
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| MCDERMOTT, WILL & EMERY |
| STEPHEN A. BECKER |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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