Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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09576322
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Filing Dt:
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05/22/2000
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Publication #:
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Pub Dt:
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06/12/2003
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Inventors:
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Won-Soo Cho, Jin-Ho Jang, Byung-Woon Kim
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Title:
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APPARATUS AND METHOD FOR AUTOMATICALLY CONTROLLING SEMICONDUCTOR MANUFACTURING PROCESS IN SEMICONDUCTOR FACTORY AUTOMATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SAN 136-1 AMI-RI, BUBAL-EUB, KYOUNGKI-DO |
| ICHON-SI, KOREA, REPUBLIC OF 467-8 |
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| JACOBSON, PRICE, HOLMAN & STERN, PLLC |
| YOON S. HAM |
| 400 SEVENTH STREET, NW |
| WASHINGTON, DC 20004 |
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