Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10023516
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Filing Dt:
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12/17/2001
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Publication #:
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Pub Dt:
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06/19/2003
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Inventors:
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Michel Pharand, Allan D. Weed
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Title:
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WAFER PEDESTAL TILT MECHANISM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DENIS ROBITAILLE |
| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| AXCELIS TECHNOLOGIES, INC. |
| DENIS ROBITAILLE |
| 108 CHERRY HILL DRIVE |
| BEVERLY MA 01915 |
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Assignment:
2
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CONSENT AND LICENSE AGREEMENT
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| 4-10-1 YOGA, SETAGAYA-KU |
| TOKYO, JAPAN 158-0097 |
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| PETER J. YIM |
| MORRISON & FOERSTER LLP |
| 425 MARKET STREET |
| SAN FRANCISCO, CA 94105-2482 |
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Assignment:
3
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 1501 WILSON BOULEVARD |
| SUITE 510 |
| ARLINGTON, VA 22209 |
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