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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/17/2004
Application #:
10163796
Filing Dt:
06/04/2002
Publication #:
Pub Dt:
06/19/2003
Inventors:
Alain Duboust, Shou-Sung Chang, Feng Q. Liu, Liang-Yuh Chen, Yan Wang, Siew Neo et al
Title:
METHOD AND APPARATUS FOR FACE-UP SUBSTRATE POLISHING
Assignment: 1
Reel/Frame:
012996/0132Recorded: 06/04/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Exec Dt:
06/03/2002
Assignee:
P.O. BOX 450A
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL
P.O. BOX 450A
SANTA CLARA, CA 95052

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