Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10017070
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Filing Dt:
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12/13/2001
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Publication #:
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Pub Dt:
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06/19/2003
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Inventors:
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Stacy K. Firth, W. Jarrett Campbell
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Title:
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SYSTEM AND METHOD FOR CONTROLLING CRITICAL DIMENSION IN A SEMICONDUCTOR MANUFACTURING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 986 WALSH AVENUE |
| SANTA CLARA, CALIFORNIA 95050 |
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| GARY CARY WARE & FREIDENRICH LLP |
| DAVID L. ALBERTI |
| 1755 EMBARCADERO ROAD |
| PALO ALTO, CA 94303-3340 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2 TECH DRIVE |
| SUITE 201 |
| ANDOVER, MASSACHUSETTS 01810 |
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| PROSKAUER ROSE LLP |
| ONE INTERNATIONAL PLACE |
| BOSTON, MA 02110 |
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