Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10032293
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Filing Dt:
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12/21/2001
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Publication #:
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Pub Dt:
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06/26/2003
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Inventors:
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Anh N. Nguyen, Steve H. Chiao, Xiaoxiong Yuan, Lawrence Chung-Lai Lei, Ming Xi et al
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Title:
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CHAMBER HARDWARE DESIGN FOR TITANIUM NITRIDE ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
3050 BOWERS AVE. |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
P.O. BOX 450A, PATENT COUNSEL |
LEGAL AFFAIRS DEPARTMENT-M/S 2061 |
SANTA CLARA, CA 95052 |
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