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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10202778
Filing Dt:
07/25/2002
Publication #:
Pub Dt:
06/26/2003
Inventors:
Peijun Ding, Zheng Xu, Roderick C. Mosely, Daniel A. Carl, Darryl Angelo et al
Title:
Self-ionized and inductively-coupled plasma for sputtering and resputtering
Assignment: 1
Reel/Frame:
013422/0828Recorded: 10/23/2002Pages: 47
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/12/2002
Exec Dt:
09/12/2002
Exec Dt:
09/20/2002
Exec Dt:
09/13/2002
Exec Dt:
09/12/2002
Exec Dt:
09/20/2002
Exec Dt:
09/19/2002
Exec Dt:
09/07/2002
Exec Dt:
09/17/2002
Exec Dt:
09/01/2002
Exec Dt:
09/12/2002
Exec Dt:
09/16/2002
Exec Dt:
09/17/2002
Exec Dt:
09/12/2002
Exec Dt:
09/12/2002
Assignee:
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL
P.O. BOX 450-A
SANTA CLARA, CA 95052

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