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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/14/2012
Application #:
10304869
Filing Dt:
11/26/2002
Publication #:
Pub Dt:
07/03/2003
Inventors:
Tadahiro Ohmi, Masaki Hirayama, Haruyuki Takano, Yusuke Hirayama
Title:
PLASMA ETCHING DEVICE
Assignment: 1
Reel/Frame:
013792/0705Recorded: 02/27/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/15/2003
Exec Dt:
01/15/2003
Exec Dt:
01/15/2003
Exec Dt:
01/15/2003
Assignees:
1-17-301, KOMEGABUKURO 2-CHOME, AOBA-KU
SENDAI-SHI, MIYAGI-KEN 980-0813, JAPAN
3 6, AKASAKA 5-CHOME, MINATO KU
TOKYO 107-0052, JAPAN
Correspondent:
RANDALL J. KNUTH, P.C.
RANDALL J. KNUTH
3510-A STELLHORN ROAD
FORT WAYNE, IN 46815-4631

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