Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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10304869
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Filing Dt:
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11/26/2002
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Publication #:
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Pub Dt:
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07/03/2003
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Haruyuki Takano, Yusuke Hirayama
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Title:
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PLASMA ETCHING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-17-301, KOMEGABUKURO 2-CHOME, AOBA-KU |
SENDAI-SHI, MIYAGI-KEN 980-0813, JAPAN |
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3 6, AKASAKA 5-CHOME, MINATO KU |
TOKYO 107-0052, JAPAN |
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RANDALL J. KNUTH, P.C. |
RANDALL J. KNUTH |
3510-A STELLHORN ROAD |
FORT WAYNE, IN 46815-4631 |
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