Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10033545
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Filing Dt:
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12/27/2001
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Publication #:
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Pub Dt:
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07/03/2003
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Inventors:
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Hyungsuk A. Yoon, Hui Zhang, Michael X. Yang, Ken Kaung Lai, Robert L. Jackson et al
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Title:
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Deposition of tungsten for the formation of conformal tungsten silicide
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PO BOX 450-A |
| SANTA CLARA, CA 96052 |
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